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Aubert T.,University of Savoy | Bardong J.,Carinthian Technology Research CTR | Legrani O.,CNRS Jean Lamour Institute | Elmazria O.,CNRS Jean Lamour Institute | And 4 more authors.
Journal of Applied Physics

We report on in situ electrical measurements of surface acoustic wave delay lines based on AlN/sapphire structure and iridium interdigital transducers between 20 °C and 1050 °C under vacuum conditions. The devices show a great potential for temperature sensing applications. Burnout is only observed after 60 h at 1050 °C and is mainly attributed to the agglomeration phenomena undergone by the Ir transducers. However, despite the vacuum conditions, a significant oxidation of the AlN film is observed, pointing out the limitation of the considered structure at least at such extreme temperatures. Original structures overcoming this limitation are then proposed and discussed. © 2013 AIP Publishing LLC. Source

Bruckner G.,Carinthian Technology Research CTR | Bardong J.,Carinthian Technology Research CTR | Gruber Ch.,Carinthian Technology Research CTR | Plessky V.,BART
Procedia Engineering

Surface acoustic wave (SAW) devices are since long known for their wireless sensing capabilities in harsh environment. While the mainstream of the investigations was so far dedicated to room temperature or high temperature applications, we have demonstrated the employment of SAW based sensors at temperatures down to -200°C. We constructed SAW sensors for cryogenic temperatures that are based on reflective delay lines and feature a unique identification number. We tested them in a dedicated setup during cooling, both wired and wireless. As results figures for the reading range, the temperature resolution and reproducibility were derived. The devices show a good and reliable performance in an operating range from -200°C to 200°C. © 2012 The Authors. Published by Elsevier Ltd. Source

Bruckner G.,Carinthian Technology Research CTR | Aubert T.,Carinthian Technology Research CTR | Bardong J.,Carinthian Technology Research CTR | Eisele D.,Albert Ludwigs University of Freiburg | And 3 more authors.
Procedia Engineering

In this paper, we investigate the thermal frequency behavior of the surface acoustic waves (0°, 138.5°, 26.7°), (0°, 22°, 31°) and surface transverse waves (STW) (0°. 22°, 90°) langasite [LGS) cuts by RF characterization means performed on delay lines up to 900°C. Above 700°C, results are altered by degradation phenomena of the Pt electrodes. We observed a strong impact of the operating frequency on the thermal frequency shifting of devices. Around the 434 MHz-ISM band, the (0°, 22°, 90°) STW cut offers similar thermal behavior as the one of the wellknown (0°,138.5°, 26.7°) Rayleigh cut. Moreover, associated to the (0°, 22°, 31°) cut, the STW one could allow for differential measurements on one unique substrate. © 2011 Published by Elsevier Ltd. Source

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