Crystallography and Structural PhysicsFAU Erlangen NurembergStaudtstr. 391052ErlangenGermany

Crystallography and Structural PhysicsFAU Erlangen NurembergStaudtstr. 391052ErlangenGermany


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Bergmann C.,Crystallography and Structural PhysicsFAU Erlangen NurembergStaudtstr. 391052ErlangenGermany | Will J.,Crystallography and Structural PhysicsFAU Erlangen NurembergStaudtstr. 391052ErlangenGermany | Groschel A.,Crystallography and Structural PhysicsFAU Erlangen NurembergStaudtstr. 391052ErlangenGermany | Weisser M.,Crystallography and Structural PhysicsFAU Erlangen NurembergStaudtstr. 391052ErlangenGermany | Magerl A.,Crystallography and Structural PhysicsFAU Erlangen NurembergStaudtstr. 391052ErlangenGermany
Physica Status Solidi (A) Applications and Materials Science | Year: 2014

The radial oxygen nucleation and precipitation in Czochralski-grown silicon crystals is observed in real time via the local evolution of the X-ray Bragg intensity. Using a high X-ray energy and a divergent beam setup, it becomes possible to examine the impact of the local as-grown point defect configuration on the formation of bulk micro defects in a crystal of macroscopic dimensions. As a salient feature the transition from vacancy- to interstitial-dominated regions in a 12" crystal can be identified, and its influence on the precipitation kinetics is quantified through effective oxygen diffusion constant. It appears enhanced by up to a factor of six in vacancy-rich regions as compared to crystal volumes which are identified as point-defect free where it agrees well with the literature value. © 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

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