Coherent LaserSystems GmbH

Gottingen, Germany

Coherent LaserSystems GmbH

Gottingen, Germany

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Sobey M.,Coherent Inc. | Schmidt K.,Coherent LaserSystems GmbH | Turk B.,Coherent Inc. | Paetzel R.,Coherent LaserSystems GmbH
Digest of Technical Papers - SID International Symposium | Year: 2014

Low-Temperature Polycrystalline Silicon (LTPS) is the enabling backplane technology for AMOLED displays and small to medium sized high-resolution AMLCDs. Recently, Excimer Laser Annealing (ELA) equipment has made significant progress in scaling for cost-effective large-scale production. In this paper, we discuss the key elements of ELA equipment and the recent and future milestones for LTPS on large substrates. © 2014 Society for Information Display.


Orr B.J.,Macquarie University | Delmdahl R.,Coherent LaserSystems GmbH | Fechner B.,Coherent LaserSystems GmbH
Optical Instrumentation for Energy and Environmental Applications, E2 2014 | Year: 2014

The use of high-energy ultraviolet excimer laser pulses to fabricate high-temperature semiconductors will be reviewed. Applications include new-generation magnetic resonance imaging instruments for medicine and low-loss electrical cables for smart grid technology. © OSA 2014.


Barke S.,Leibniz University of Hanover | Wang Y.,Leibniz University of Hanover | Wang Y.,University of Western Australia | Esteban Delgado J.J.,Leibniz University of Hanover | And 4 more authors.
Classical and Quantum Gravity | Year: 2015

The most promising concept for low frequency (millihertz to hertz) gravitational wave observatories are laser interferometric detectors in space. It is usually assumed that the noise floor for such a detector is dominated by optical shot noise in the signal readout. For this to be true, a careful balance of mission parameters is crucial to keep all other parasitic disturbances below shot noise. We developed a web application that uses over 30 input parameters and considers many important technical noise sources and noise suppression techniques to derive a realistic position noise budget. It optimizes free parameters automatically and generates a detailed report on all individual noise contributions. Thus one can easily explore the entire parameter space and design a realistic gravitational wave observatory. In this document we describe the different parameters, present all underlying calculations, and compare the final observatory's sensitivity with astrophysical sources of gravitational waves. We use as an example parameters currently assumed to be likely applied to a space mission proposed to be launched in 2034 by the European Space Agency. The web application itself is publicly available on the Internet at http://spacegravity.org/designer. Future versions of the web application will incorporate the frequency dependence of different noise sources and include a more detailed model of the observatory's residual acceleration noise. © 2015 IOP Publishing Ltd.


Delmdahl R.,Coherent LaserSystems GmbH | Esser H.-G.,Coherent LaserSystems GmbH | Bonati G.,Coherent LaserSystems GmbH
Proceedings of SPIE - The International Society for Optical Engineering | Year: 2016

Ongoing progress in mass analysis applications such as laser ablation inductively coupled mass spectrometry of solid samples and ultraviolet photoionization mediated sequencing of peptides and proteins is to a large extent driven by ultrashort wavelength excimer lasers at 193 nm. This paper will introduce the latest improvements achieved in the development of compact high repetition rate excimer lasers and elaborate on the impact on mass spectrometry instrumentation. Various performance and lifetime measurements obtained in a long-term endurance test over the course of 18 months will be shown and discussed in view of the laser source requirements of different mass spectrometry tasks. These sampling type applications are served by excimer lasers delivering pulsed 193 nm output of several mJ as well as fast repetition rates which are already approaching one Kilohertz. In order to open up the pathway from the laboratory to broader market industrial use, sufficient component lifetimes and long-term stable performance behavior have to be ensured. The obtained long-term results which will be presented are based on diverse 193 nm excimer laser tube improvements aiming at e.g. optimizing the gas flow dynamics and have extended the operational life the laser tube for the first time over several billion pulses even under high duty-cycle conditions. © 2016 SPIE.


Paetzel R.,Coherent LaserSystems GmbH
CLEO: Applications and Technology, CLEO-AT 2015 | Year: 2015

Low-Temperature Polycrystalline Silicon (LTPS) is the enabling backplane technology for AMOLED displays and small to medium sized high-resolution AMLCDs. Progress on Excimer Laser Annealing towards large-scale production of LTPS is described. © 2015 OSA.


Van Der Wilt P.C.,Coherent LaserSystems GmbH
Digest of Technical Papers - SID International Symposium | Year: 2014

Recent commercial success of high-resolution AMLCDs and AMOLED displays has led to accelerated adoption and scale-up of ELA, the preferred technique for creating LTPS films. Here, key aspects of the process are discussed; in particular, the formation of laser-induced periodic surface structures (LIPSS) and the super-lateral growth (SLG) phenomenon. Also, a novel upright-microscopy technique is described for characterization of ELA-processed films. © 2014 Society for Information Display.


Delmdahl R.,Coherent LaserSystems GmbH | Patzel R.,Coherent LaserSystems GmbH
Journal of Physics D: Applied Physics | Year: 2014

State-of-the art pulsed UV excimer laser technology has a proven track record of stable performance under three-shift operation conditions in various industrial thin-film applications at stabilized pulse energy levels ranging from 100 to 1000 mJ per pulse. For the last 25 years excimer laser technology has formed the backbone of pulsed laser deposition advances. The available UV average power level nowadays exceeds 1 kW and novel excimer laser beam utilization schemes in combination with sophisticated substrate-target geometries are ready to utilize the full laser upscaling potential and thereby reduce unit costs. © 2014 IOP Publishing Ltd.


Delmdahl R.,Coherent LaserSystems GmbH | Patzel R.,Coherent LaserSystems GmbH | Senczuk R.,Coherent LaserSystems GmbH | Brune J.,Coherent LaserSystems GmbH
ICALEO 2013 - 32nd International Congress on Applications of Lasers and Electro-Optics | Year: 2013

Glass is a promising material from which advanced interposers for high density electrical interconnects for 2.5D chip packaging can be produced. The supply of ultra-thin glass wafers with thicknesses of 100 μm and below is cost-comparable relative to polished thin wafers made of silicon. As thin glass is extremely brittle, micromachining to create through glass vias is particularly challenging and laser processing using deep UV excimer lasers at a wavelength of 193 nm and ultra-short pulse laser provide a viable solution. In this work, the through glass via drilling capabilities using high energy excimer lasers are shown. Smallest through glass via diameters down to 10 μm with smallest pitch size can be realized using an ultrashort excimer laser wavelength of 193 nm at high laser fluence of several Joules per square centimeter. In favour of volume processing economics, large field size mask illumination supports parallel drilling of up over 1,000 through vias in 30 to 100 μm thin glass sheets. Recent laser glass drilling results will be shown and opportunities for industrial mass production upscaling based on 193 nm excimer lasers will be discussed.


Delmdahl R.,Coherent LaserSystems GmbH | Fricke M.,Coherent LaserSystems GmbH | Fechner B.,Coherent LaserSystems GmbH
Journal of Information Display | Year: 2014

Laser lift-off (LLO) delamination opens the path to polymer-based display backplanes for use in electrophoretic e-readers, AMOLED (Active-Matrix Organic Light Emitting Diode) smartphones, tablets, and OLED-TV. The proper choice of wavelength, optical system, and fluence enables the layer-selective LLO processing of functional thin films not achievable with other radiative or non-radiative heat sources. This becomes increasingly attractive as the feature size and film thickness in microelectronics applications are continuously being downscaled. Excimer lasers provide the 308 nm wavelength and short pulse duration required for highly localized energy coupling. The high output power of excimer lasers enables a large processing footprint and the high-throughput rates needed in mass manufacturing. Thin-film transistor structures fabricated on top of polymer layers spun on glass panels must be delaminated to create thin, lightweight, and rugged flexible-display backplanes. Low-thermal-budget lift-off processing with UV lasers protects the adjacent functional layers. When it comes to large Gen 4.5-Gen 8 substrate panels, which have to be released from polymer thin films, it is most effective to use line beam scanning for LLO within one to three consecutive scans. © 2014 The Korean Information Display Society.


Paetzel R.,Coherent LaserSystems GmbH
Conference on Lasers and Electro-Optics Europe - Technical Digest | Year: 2015

Low-Temperature Polycrystalline Silicon (LTPS) is the enabling backplane technology for AMOLED displays and small to medium sized high-resolution AMLCDs. Progress on Excimer Laser Annealing towards large-scale production of LTPS is described. © 2015 OSA.

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