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CAS Shanghai Institute of Optics and fine Mechanics | Date: 2017-05-17

A hollow-core photonic crystal fiber gas cell and method for preparing the same. The hollow-core photonic crystal fiber gas cell comprises a single-mode fiber, a fiber splicing protection sleeve, a hollow-core photonic crystal fiber, and a photoelectric detector. One end of the single-mode fiber is fusion spliced with one end of the hollow-core photonic crystal fiber to form a fusion splice and seal one end of the hollow-core photonic crystal fiber gas cell. The fiber splicing protection sleeve covers and protects the fusion splice. The other end of the hollow-core photonic crystal fiber is processed into an output end by fusion sealing, and the surface of the output end faces, but is not parallel to, a detection surface of the photoelectric detector.

CAS Shanghai Institute of Optics and fine Mechanics | Date: 2017-06-21

A random grating based compressive sensing wideband hyperspectral imaging system comprising a front imaging component, an optical splitting component, more than two branches, and a computer, with each branch having an exit pupil transformation component and a compressive spectral imaging component. The system is based on compressive sensing theory, makes use of the correlation between spectra, increases compression rate on the spectral dimension, realizes three-dimensional compressive collection of wideband spectral image data, and greatly reduces data collection amount. The system is capable of measuring spectral image information on a wideband spectrum with a single exposure, and may obtain high spatial resolution and high spectral resolution by means of designing the random gratings on the various spitting paths.

Shanghai Micro Electronics Equipment Co., CAS Shanghai Institute of Optics and fine Mechanics | Date: 2014-01-10

Six-axis four-subdividing interferometer comprising a six-axis light splitting system and an interference module which are sequentially arranged along the incident direction of polarization orthogonal double-frequency laser, wherein the six-axis light splitting system comprises five 45-degree plane beam splitters and four 45-degree full-reflecting minors.

Sugioka K.,RIKEN | Cheng Y.,CAS Shanghai Institute of Optics and fine Mechanics
Light: Science and Applications | Year: 2014

The unique characteristics of ultrafast lasers, such as picosecond and femtosecond lasers, have opened up new avenues in materials processing that employ ultrashort pulse widths and extremely high peak intensities. Thus, ultrafast lasers are currently used widely for both fundamental research and practical applications. This review describes the characteristics of ultrafast laser processing and the recent advancements and applications of both surface and volume processing. Surface processing includes micromachining, micro-and nanostructuring, and nanoablation, while volume processing includes two-photon polymerization and three-dimensional (3D) processing within transparent materials. Commercial and industrial applications of ultrafast laser processing are also introduced, and a summary of the technology with future outlooks are also given. © 2014 CIOMP.

Liu L.,CAS Shanghai Institute of Optics and fine Mechanics
Applied Optics | Year: 2013

This paper reviews our studies on coherent and incoherent synthetic-aperture imaging ladars (SAILs). Using optical diffraction, a systematic theory of side-looking SAIL was mathematically formulated and the necessary conditions for assuring a correct phase history are established. Based on optical transformation and regulation of wavefront, a down-looking SAIL of two distinctive architectures was invented and the basic principle, systematic theory, design equations, and necessary conditions are presented. An incoherent spotlight-mode SAIL was proposed, and detailed mathematically. To validate the concepts, laboratory experiments were conducted. The spatially and temporally dependent laser speckles are analyzed by applying the partial coherence theorem, and proposals to reduce their effect are given. Optical antennas and their components are discussed. It is shown that for down-looking SAIL the width of the scanning strip may be greatly increased without loss of high resolution, and the influences from atmospheric turbulence and unmodeled line-of-sight motion can be automatically compensated. © 2013 Optical Society of America.

CAS Shanghai Institute of Optics and fine Mechanics | Date: 2016-05-11

Illumination system for a lithographic projection exposure step-and-scan apparatus comprising a light source, a pupil shaping unit, a field defining unit, a first lens array, a first slit array, a second lens array, a third lens array, a second slit array, a fourth lens array, a condenser lens, and a scanning drive unit sequentially arranged along the light beam propagation direction. The illumination system reduces requirements on lens processing, slit scanning speed, and slit scanning precision, therefore may be implemented more easily.

CAS Shanghai Institute of Optics and fine Mechanics | Date: 2015-12-02

A lithography illumination system, along the transmission direction of the laser light, successively comprising a laser light source, a collimating and expanding unit, a pupil shaping unit, a first micro-lens array, a micro-integrator rod array, a micro-scanning slit array, a second micro-lens array, a condenser lens group, a mask, and and a motion control unit for controlling the motion of the micro scanning slit array.

CAS Shanghai Institute of Optics and fine Mechanics | Date: 2015-04-22

The invention discloses a device and a method for measuring phase retardation distribution and fast axis azimuth angle distribution of a birefringence sample in real time. The device comprises a collimating light source, a circular polarizer, a diffractive beam-splitting component, a quarter-wave plate, an analyzer array, a charge coupled device (CCD) image sensor and a computer with an image acquisition card. The method can measure the phase retardation distribution and the fast axis azimuth angle distribution of the birefringence sample in real time and has large measurement range. The measurement result is immune to the light-intensity fluctuation of the light source.

CAS Shanghai Institute of Optics and fine Mechanics | Date: 2016-01-27

A lithography pupil shaping optical system and method for generating off-axis illumination mode are disclosed. The invention is composed of an illumination mode generation unit, a rotatable wave plate, a polarization beam splitter unit, a ring I generation unit and a ring II generation unit. Through selecting corresponding diffractive optical element and appropriate adjustment, this invention can generate various illumination modes including single ring illumination modes and double rings illumination modes. The intensity at the pupil plane and the inner and outer diameters of the off-axis illumination mode can be adjusted continuously.

CAS Shanghai Institute of Optics and fine Mechanics | Date: 2016-05-25

An illumination device comprising a laser source, a beam expander, a micromirror array having a first control system, a fast steering mirror having a second control system, a diaphragm array, a microlens array, an illumination lens group, and a reflection mirror sequentially along the propagation direction of the laser beam. The first control system comprises a first computer controlling each micromirror on the micro-mirror array through the micromirror array controller to rotate in two-dimensional directions so expanded beam forms desired intensity patterns on the diaphragm array after reflected by the micromirror array and fast reflection mirror and a micromirror array controller; the second control system comprises a second computer controlling the reflection mirror of the fast steering mirror to rotate through fast steering mirror controller so created intensity pattern moves relative to the diaphragm array and a fast steering mirror controller. Method for using the illumination device is provided.

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