Brooks Automation Inc. | Date: 2016-12-12
A time-optimal trajectory generation method, for a robotic manipulator haying a transport path with at least one path segment, comprising generating a forward time-optimal trajectory of the manipulator along the at least one path segment from a start point of the at least one path segment towards an end point of the at least one path segment, generating a reverse time-optimal trajectory of the manipulator along the at least one path segment from the end point towards the start point of the at least one path segment, and combining the time-optimal forward and reverse trajectories to obtain a complete time optimal trajectory, where the forward and reverse trajectories of the at least one path segment are blended together with a smoothing bridge joining the time-optimal forward and reverse trajectories in a position-velocity reference frame with substantially no discontinuity between the time-optimal forward and reverse trajectories.
Brooks Automation Inc. | Date: 2016-12-05
A substrate processing apparatus including a frame defining a chamber with a substrate transport opening and a substrate transfer plane defined therein, a valve mounted to the frame and being configured to seal an atmosphere of the chamber when closed, the valve having a door movably disposed to open and close the substrate transport opening, and at least one substrate sensor element disposed on a side of the door and oriented to sense substrates located on the substrate transfer plane.
Brooks Automation Inc. and Chart Inc. | Date: 2016-03-30
A configurable cryogenic storage device has a freezer and a rack carrier positioned inside of the freezer. The freezer includes a bearing and a drive shaft though the freezer, the drive shaft being coupled to the rack carrier inside the freezer and adapted to be coupled to a motor assembly. The rack carrier rests on the bearing in a manual rotation configuration and hangs from the drive shaft when the motor is connected. Coupling the drive shaft to the motor assembly lifts the rack carrier and decouples the bearing and enables automated rotation of the rack carrier by the motor. The rack carrier includes rack-mounting features holding a plurality of sample storage racks. The sample storage racks hang from the rack carrier and the rack-mounting features precisely position the end of each sample storage rack.
Brooks Automation Inc. | Date: 2016-03-30
An automated cryogenic storage system includes a freezer and an automation system to provide automated transfer of samples to and from the freezer. The freezer includes a bearing and a drive shaft though the freezer, the drive shaft being coupled to a rack carrier inside the freezer and adapted to be coupled to a motor. The automation module includes a rack puller that is automatically positioned above an access port of the freezer. The rack puller engages with a sample rack within the freezer, and elevates the rack into an insulating sleeve external to the freezer. From the insulating sleeve, samples can be added to and removed from the sample rack before it is returned to the freezer.
Brooks Automation Inc. | Date: 2016-09-20
A cryopump comprises a refrigerator, a condensing array cooled by the refrigerator, a radiation shield surrounding the condensing array and cooled by the refrigerator. The radiation shield has a frontal opening covered by a frontal array that is also cooled by the refrigerator. The frontal array comprises louvers across an otherwise substantially open center region of the frontal opening and an orifice plate across an outer region of the frontal opening. The hybrid frontal array allows for pumping speeds approximating those of a louver frontal array but with flow control comparable to an orifice plate.
Brooks Automation Inc. | Date: 2016-02-03
A control system (100) for complex non linear machines including a clustered architecture comprising:- a master controller (105), one or more cluster controllers (110) each defining a cluster, remote controllers (115, 150) and end effectors,- a central control section including one or more first remote controllers, said first remote controllers being autonomous remote controllers (150) under direct control of the master controller and- a distributed control section including said cluster controller (110) controlled by the master controller (105), wherein each of said cluster controllers controls the activities of one or more second remote controllers (115) in said cluster, each of the first and second remote controllers being utilized to drive one or more axes of end effectors of complex multi axis non linear machines,wherein the master controller includes a processor configured to generate trajectories, run control algorithms and provide torque commands for implementation by the autonomous remote controller (150);and wherein said master controller and at least said one or more cluster controllers are connected together to a communication network (120) of said control system and defines nodes of said network.
Brooks Automation Inc. | Date: 2016-07-06
In accordance with an embodiment of the invention, there is provided a method for cooling a load, the method comprising:compressing a primary refrigerant (104) in a primary compressor (109) of a closed loop primary refrigeration system, the primary compressor (109) taking in a primary refrigerant at a low pressure and discharging the primary refrigerant at a high pressure;transferring the primary refrigerant (104) at the high pressure from the primary compressor (109) to an inlet of an insulated enclosure (110) , and returning the primary refrigerant at the low pressure from the insulated enclosure to the primary compressor;transferring the primary refrigerant at the high pressure to at least one heat exchanger within the insulated enclosure (110), and cooling the primary refrigerant in the at least one heat exchanger using heat exchange with a secondary refrigerant from a secondary refrigeration system, the secondary refrigeration system comprising at least one secondary cryogenic refrigerator (101, 102, 103);expanding the primary refrigerant using an expansion unit within the insulated enclosure (110), the expansion unit (107) receiving the primary refrigerant at the high pressure from the at least one heat exchanger and discharging the primary refrigerant at the low pressure;delivering (114) the primary refrigerant at the low pressure to the load (108) and returning the primary refrigerant from the load (108) to the primary refrigeration system; andcontrolling operation (139) of at least one of the primary refrigeration system and the secondary refrigeration system to provide a variable refrigeration capacity to the load.
Brooks Automation Inc. | Date: 2016-04-29
A helium management control system for controlling the helium refrigerant supply from a common manifold supplies cryogenic refrigerators with an appropriate helium supply. The system employs sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators depending on the computed aggregate cooling demand of all of the cryogenic refrigerators. An appropriate supply of helium is distributed to each cryopump by sensing excess and sparse helium and redistributing refrigerant accordingly. If the total refrigeration supply exceeds the demand, or consumption, excess refrigerant is directed to cryogenic refrigerators which can utilize the excess helium to complete a current cooling function more quickly. If the total refrigeration demand exceeds the total refrigeration supply, the refrigerant supply to some or all of the cryogenic refrigerators will be reduced accordingly so that detrimental or slowing effects are minimized based upon the current cooling function.
Brooks Automation Inc. | Date: 2016-02-01
A cryopump has a simple-to-manufacture frontal baffle plate with improved gas distribution and has a large-area second-stage array plate to capture Type II gases. The cryopump has a first-stage frontal baffle plate having orifices and flaps bent from and attached to the orifices. The cryopump has a second-stage top plate that is larger in area than cooling baffles of the second stage array.
Brooks Automation Inc. | Date: 2016-01-05
A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.