Erwin Kessels W.M.M.,TU Eindhoven |
Putkonen M.,Beneq Oy
MRS Bulletin | Year: 2011
As applications of atomic layer deposition (ALD) in emerging areas such as nanoelectronics, photovoltaics, and flexible electronics expand beyond single-wafer semiconductor processing, there is a growing need for novel approaches to integrate new process designs, substrate materials, and substrate delivery methods. An overview is given of new means to extend the capabilities of ALD and to improve the speed and simplicity of ALD coatings using new reactor designs. These include energy-enhanced and spatial ALD schemes involving plasma, direct-write, atmospheric pressure, and roll-to-roll processing. The long-term goal of this work is to integrate viable high-throughput capabilities with ALD processes. © © 2011 Materials Research Society. Source
Beneq Oy | Date: 2013-07-08
The present invention relates to an apparatus and method for processing a surface of a substrate by subjecting the surface to successive surface reactions of a first and second precursor. The apparatus includes a nozzle head having two or more precursor nozzles and a moving mechanism for moving the nozzle head in non-linear oscillating movement in a first and second movement direction between a first extreme position and a second extreme position via a centre position. The moving mechanism includes first driving means for accelerating the nozzle head in the first moving direction and decelerating the nozzle head in the second moving direction and second driving means for accelerating the nozzle head in the second moving direction and decelerating the nozzle head in the first moving direction.
Agency: Cordis | Branch: FP7 | Program: JTI-CP-FCH | Phase: SP1-JTI-FCH.2012.1.5 | Award Amount: 4.68M | Year: 2013
Project CATAPULT proposes to develop a radically new concept for automotive PEM fuel cell catalysts based on novel structures wherein platinum is deposited as an extremely thin layer ( <3 nm) on corrosion resistant supports of various morphologies, including particulate, nanofibrous and nanotubular, as well as nano-hierarchical combinations of these. In this approach, platinum is deposited using atomic layer deposition as thin, contiguous and conformal films that allow development of extended platinum or platinum alloy surfaces. Non-PGM catalysts will be developed via the tailored synthesis of metal-organic frameworks for their use either sacrificially to generate the C/N support for non-PGM species, or directly as a non-PGM catalyst. Hybrid ultra-low Pt/non-PGM catalysts and catalyst layers will also be investigated as a further novel approach. Increased fundamental understanding from supporting theoretical modelling will provide guidance to the strategies developed experimentally and to the down-selection of the new corrosion-resistant supports and their supported catalyst designs. Down-selected catalysts will be integrated into novel electrode designs and into MEAs incorporating state of the art membranes best adapted for automotive power trains, and evaluated according to protocols reproducing the stresses encountered in a drive cycle. The candidate MEA best satisfying performance and stability targets will be scaled-up for further assessment at large MEA and short stack levels. Techno-economic assessment will consider the scale up processability, and the impact of MEA performance and durability on stack costs. The well-balanced partnership, comprising two large industries (including an automotive OEM), two SMEs, two research organisations and two universities, will ensure close cooperation between industrial and institute partners, know-how, experience, research leadership, complementarity and industrial relevance.
Agency: Cordis | Branch: H2020 | Program: RIA | Phase: ICT-29-2014 | Award Amount: 4.36M | Year: 2015
The flexolighting programme is focussed on research and innovations on materials, processes and device technology for OLED lighting with the intention of building a supply chain within Europe. The aim is to realise OLED devices over a large area/surface with high brightness, high uniformity and long life time. A demonstrator will be built and delivered at the end of the project. The main targets are (i). Cost of the lighting panels should be less than Euro 1 per 100 lumens. (II). high luminous efficiency, in excess of 100 lm/W with improved out-coupling efficiency. (ii). white light life-time of at least 1000 hours at 97% of the original luminance of 5000 cdm-2.(iii). The materials and the devices therefrom will allow for differential aging of the colours, thus maintaining the same colour co-ordinates and CRI over its use. (iv). Attention will be paid to recyclability and environmental impact of the materials and the OLED lighting systems. Flexolighting project will also ensure European industrial leadership in lighting. The introduction of OLED Lighting technology is held back by the current cost of the systems, life-time and poor uniformity of luminance on large area panels. The programme aims to combine existing state of the art OLED materials technology (Thermally activated fluorescent materials (TADF) and phosphorescent emitters and world class transport materials) with new developments in processing technologies (Organic Vapour Phase Deposition (OVPD) and printing technologies) to develop new next of generation low cost OLED lighting systems to move forward to scale up and full scale production on novel planarized flexible steel substrates with cost effective conformal encapsulation method. The transparent top contacts made of thin metallic films, conducting polymers or graphene monolayer with metal tracks to reduce the series resistance will be employed in inverted top emitting OLED structures to deliver 100 lumens per Euro.
Beneq Oy | Date: 2013-02-12
A nozzle and nozzle head arranged to subject a surface of a substrate to gaseous precursors. The nozzle includes an output face via which the precursor is supplied, a longitudinal precursor supply element for supplying precursor and a longitudinal discharge channel open to and along the output face for discharging at least a fraction of the precursor supplied from the precursor channel. The precursor supply element is arranged to extend inside the discharge channel such that the precursor supply element divides the discharge channel in the longitudinal direction to a first discharge sub-channel and a second discharge sub-channel on opposite sides of the precursor supply element for supplying precursor through the discharge channel.