Martinsried, Germany
Martinsried, Germany
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Muellner P.,ATT Systems | Bruck R.,ATT Systems | Bamberger R.,ATT Systems | Karl M.,AMO GmbH | And 2 more authors.
Procedia Engineering | Year: 2010

We present a novel wavelength multiplexing concept for an integrated sensor array based on SOI photonic Mach-Zehnder interferometers. The characteristics of the entire device are discussed and the design, performed on the basis of FEM and 3D FDTD simulations, as well as first measurements of the nanophotonic key components - micro ring resonators and a photonic wire Bragg gratings - are presented.


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We offer a wide range of extremly performant, reliable temperature control systems for the semiconductor industry. The modular concept for convenient, cost effective system upgrades, highest safety of investment and easy customization ...


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We focus on creating the best products that offer our customers a tremendous competitive advantage. That takes talented, innovative, and creative people ...


ATT Advanced Temperature Test Systems GmbH is founded by Markus Eibl. A team of highly skilled and seasoned engineers develops the next-generation products with a deep understanding of our customers technological needs ...


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Visit us at the SEMICON shows worldwide To guarantee the best service and information, please contact us for an individual appointment by email or phone +49-89-89.94 ...


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The ATT Systems Technical Support Department strives to impress our customers with the reliability, accuracy and overall performance of all their products today and for the long term. Experienced, trained technical support personnel, responsive to maintaining our equipment operating always at its best ...


With more than 10 years of experience in developing thermal chuck systems for wafer prober we seek answers required to develop top of the line solutions. Thermal chuck systems that combine uncompromising performance with exceptional specifications ...

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