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Costacurta S.,Associazione CIVEN Nano Fabrication Facility | Malfatti L.,University of Sassari | Patelli A.,Associazione CIVEN Nano Fabrication Facility | Falcaro P.,CSIRO | And 5 more authors.
Plasma Processes and Polymers | Year: 2010

An advanced lithographic technique which is based on direct writing of thin films by hard X-rays has been developed. Silica hybrid organic-inorganic films have been deposited by radio frequency plasma-enhanced chemical vapour deposition and have been patterned using deep X-ray lithography with synchrotron light. The exposure to high energy photons removed the organic groups in the films and induced densification of the silica network. The films, after lithographic writing, can be easily chemically etched to obtain well-defined patterns of high quality. By tuning the exposure dose it is possible modulating the structure and the properties of the final material. The overall lithography process can be achieved in two steps, writing by X-rays and chemical etching, therefore employing the hybrid film directly as resist without employing any other intermediate step. The films and the patterned structures have been characterized by ellipsometric spectroscopy, scanning electron microscopy, atomic force microscopy, contact angle measurements, Fourier transform infrared spectroscopy, infrared imaging and Rutherford backscattering. (Figure Presented) © 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

Falcaro P.,CSIRO | Costacurta S.,Associazione CIVEN Nano Fabrication Facility | Malfatti L.,University of Sassari | Buso D.,CSIRO | And 8 more authors.
ACS Applied Materials and Interfaces | Year: 2011

A phenyl-based hybrid organic -inorganic coating has been synthesized and processed by hard X-ray lithography. The overall lithography process is performed in a two-step process only (X-rays exposure and chemical etching). The patterns present high aspect ratio, sharp edges, and high homogeneity. The coating has been doped with a variety of polycyclic aromatic hydrocarbon functional molecules, such as anthracene, pentacene, and fullerene. For the first time, hard X-rays have been combined with thick hybrid functional coatings, using the sol-gel thick film directly as resist. A new technique based on a new material combined with hard X-rays is now available to fabricate optical devices. The effect due to the high-energy photon exposure has been investigated using FT-IR and Raman spectroscopy, laser scanner, optical profilometer, and confocal and electron microscope. Highquality thick hybrid fullerene-doped microstructures have been fabricated. © 2011 American Chemical Society.

Lisi F.,University of Pisa | Lisi F.,CSIRO | Carta D.,Associazione CIVEN Nano Fabrication Facility | Villanova L.,University of Venice | And 7 more authors.
Journal of Sol-Gel Science and Technology | Year: 2011

Functional coatings with amino groups are used in a wide range of biochemistry-related applications. A technological platform that takes advantage of the affinity between amino-functionalized coatings and biomolecules is the DNA microarray methodology. Reliability and reproducibility of the microarray data strongly depend on the quality of the substrate; therefore, a proper awareness of how the storage conditions affect the amino-functionalized coatings is necessary. In this work we have studied the influence of different relative humidity levels on aminomethyl- silane coatings prepared via sol-gel methodology. Drops of a buffer solution containing a luminescent dye have been deposited (or spotted) on the coating; the dye molecules react with the amino-groups and leave circular luminescent marks (spots) on the substrate surface. Shape and luminescence of the spots, as well as background signals, have been monitored using a microarray laser scanner. With the proposed protocol we have measured the changes of these variables due to different storage conditions. FT-IR measurements have been performed to investigate the related chemistry changes. © 2011 Springer Science+Business Media, LLC.

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