Saitama, Japan
Saitama, Japan

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Patent
Advantest Corporation | Date: 2016-08-09

A probe includes a transmission line support substrate, a probe tip and a probe tip support substrate. The transmission line support substrate supports a transmission line through which a terahertz wave is transmitted. The probe tip transmits the terahertz wave, and is contact with an object to be measured. The probe tip support substrate supports the probe tip. The probe tip support substrate is detachable from the transmission line support substrate.


Patent
Advantest Corporation | Date: 2016-07-28

Provided is an exposure apparatus that exposes a pattern on a sample, the exposure apparatus including a plurality of blanking electrodes that are provided corresponding to a plurality of charged particle beams and each switch whether the corresponding particle beam irradiates the sample according to an input voltage; an irradiation control section that outputs switching signals for switching blanking voltages supplied respectively to the blanking electrodes; and a measuring section that, for each blanking electrode, measures a delay amount that is from when the switching signal changes to when the blanking voltage changes.


Patent
Advantest Corporation | Date: 2017-03-29

Provided is an exposure apparatus that exposes a pattern on a sample, the exposure apparatus including a plurality of blanking electrodes that are provided corresponding to a plurality of charged particle beams and each switch whether the corresponding particle beam irradiates the sample according to an input voltage; an irradiation control section that outputs switching signals for switching blanking voltages supplied respectively to the blanking electrodes; and a measuring section that, for each blanking electrode, measures a delay amount that is from when the switching signal changes to when the blanking voltage changes.


Patent
Advantest Corporation | Date: 2017-01-25

A infrared optical biosensing apparatus is provided which includes: a probe including an infrared light emitting element which emits infrared light, an output variation detection element which detects output variation of the infrared light emitting element, and a light receiving element which detects the infrared light scattered in a living organism; and an operation unit which calculates information on the living organism based on output data of the light receiving element. The operation unit corrects the information on the living organism in accordance with a detection result of the output variation detection element.


Patent
Advantest Corporation | Date: 2016-07-21

A infrared optical biosensing apparatus is provided which includes: a probe including an infrared light emitting element which emits infrared light, an output variation detection element which detects output variation of the infrared light emitting element, and a light receiving element which detects the infrared light scattered in a living organism; and an operation unit which calculates information on the living organism based on output data of the light receiving element. The operation unit corrects the information on the living organism in accordance with a detection result of the output variation detection element.


An automated test equipment includes a test processor configured to provide a signal to a device under test on the basis of a sequence of instructions defining an evaluation of test vectors. The test processor is configured to map a test vector onto a set of signal states or signal transitions. Furthermore, the test processor is configured to variably select a number of signal states or signal transitions provided in the signal based on a current test vector in dependence on a current instruction.


Patent
Advantest Corporation | Date: 2016-11-23

Objective: To use a charged particle beam to form a complex and fine pattern by decreasing movement error of a stage. Means for Achieving the Objective: an exposure apparatus comprising a beam generating section that generates a charged particle beam; a stage section (110) that has a sample (10) mounted thereon and moves the sample relative to the beam generating section; a detecting section (114) that detects a position of the stage section; a predicting section (1000) that generates a predicted drive amount obtained by predicting a drive amount of the stage section based on a detected position of the stage section; and an irradiation control section (170) that performs irradiation control for irradiating the sample with the charged particle beam, based on the predicted drive amount. Also provided is an exposure method.


Patent
Advantest Corporation | Date: 2016-06-15

This invention relates to an apparatus, a method and a computer program for calculating one or more scattering parameters of a linear network, the network including a number of N ports adapted to provide electric connections. The apparatus is configured to calculate, and the method includes calculating, one or more scattering parameters of the linear network, which are related to a reference impedance, on the basis of a measured electrical response at one or more ports of the linear network to an incident wave applied at a port of the linear network, measured under the condition that one or more of other ports of the linear network face a reflection coefficient with an amplitude of 0.5 or larger. The computer program is adapted to perform such a method and runs on a computer.


A power supply device for a test equipment, test equipment having a power supply device and a method for operating a power supply device are described. The power supply device is configured for an at least partly capacitive load and has an output voltage provider configured to generate a target voltage, which is energized by an input supply voltage provided at an input of the power supply, wherein the target voltage generates an output supply voltage at the capacitive load, when the capacitive load is connected to an output of the power supply and a supply current monitor configured to monitor supply current flowing into the input of the power supply and to temporarily reduce the target voltage generating the output supply voltage, if a current value of the supply current exceeds a first predetermined threshold.


A method for characterizing a FM chirp signal generated by a device under test (DUT) is disclosed. The method comprises receiving a selection of a sample frequency and chirp duration for capturing the FM chirp signal. The method also comprises down converting the FM chirp signal and capturing the FM chirp signal using a digital pin electronics card. The method comprises obtaining a plurality of period measurements from the captured FM chirp signal using a timing measurement unit (TMU) of an automated test equipment (ATE) and converting each of the plurality of period measurements into corresponding frequency values.

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