Advantest Corporation

Saitama, Japan

Advantest Corporation

Saitama, Japan
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Patent
Advantest Corporation | Date: 2017-01-31

An automatic tuning assist circuit is coupled with a transmission antenna. Multiple switches SW and a first auxiliary capacitor CA are arranged between a first terminal and a second terminal of the automatic tuning assist circuit. A first control unit is configured to switch on and off the multiple switches SW in synchronization with a driving voltage V_(DRV). A power supply is configured to apply the driving voltage V_(DRV )across a series circuit that comprises the transmission antenna and the automatic tuning assist circuit.


Provided is a charged particle beam lens apparatus having a small size and high resolution, and a charged particle beam column and a charged particle beam exposure apparatus. A charged particle beam lens apparatus includes a lens unit positioned around a through hole through which a charged particle beam (EB) travels, where the lens unit is configured to converge or diffuse the charged particle beam, and a supporting unit (50) surrounding the lens unit. Here, at least one of an outer peripheral portion of the lens unit that is in contact with the supporting unit and an inner peripheral portion of the supporting unit that is in contact with the lens unit includes a groove (61) through which a coolant fluid flows along an outer periphery of the lens unit. In this way, the charged particle beam lens apparatus can achieve a small size and high resolution.


Patent
Advantest Corporation and University of Tokyo | Date: 2017-01-23

A power supply apparatus supplies a power supply voltage V_(DD). The power supply apparatus includes a compensation circuit in addition to a main power supply. The compensation circuit receives, via its input, as a feedback signal, a detection signal V_(S )that corresponds to the power supply voltage V_(DD). The compensation circuit has input/output characteristics f_(IO )that correspond to the characteristics of the main power supply and the characteristics of a target power supply to be emulated. The compensation circuit injects or otherwise draws a compensation current i_(COMP )that corresponds to the detection signal V_(S )to or otherwise from a node for generating the power supply voltage V_(DD).


Patent
Advantest Corporation | Date: 2017-04-24

Embodiments provide a scheduler for scheduling test times of a plurality of tester software environments for an automatic test equipment. The scheduler is configured to automatically assign test times to the plurality of tester software environments, to acquire test instructions from a tester software environment of the plurality of tester software environments to which a current test time is assigned, to control the automatic test equipment to perform a test according to the test instructions in order to obtain test results, and to provide the test results to the tester software environment of the plurality of tester software environments to which the current test time is assigned.


Patent
Advantest Corporation | Date: 2017-01-25

A infrared optical biosensing apparatus is provided which includes: a probe including an infrared light emitting element which emits infrared light, an output variation detection element which detects output variation of the infrared light emitting element, and a light receiving element which detects the infrared light scattered in a living organism; and an operation unit which calculates information on the living organism based on output data of the light receiving element. The operation unit corrects the information on the living organism in accordance with a detection result of the output variation detection element.


Patent
Advantest Corporation | Date: 2017-03-29

Provided is an exposure apparatus that exposes a pattern on a sample, the exposure apparatus including a plurality of blanking electrodes that are provided corresponding to a plurality of charged particle beams and each switch whether the corresponding particle beam irradiates the sample according to an input voltage; an irradiation control section that outputs switching signals for switching blanking voltages supplied respectively to the blanking electrodes; and a measuring section that, for each blanking electrode, measures a delay amount that is from when the switching signal changes to when the blanking voltage changes.


Patent
Advantest Corporation | Date: 2016-08-09

A probe includes a transmission line support substrate, a probe tip and a probe tip support substrate. The transmission line support substrate supports a transmission line through which a terahertz wave is transmitted. The probe tip transmits the terahertz wave, and is contact with an object to be measured. The probe tip support substrate supports the probe tip. The probe tip support substrate is detachable from the transmission line support substrate.


Patent
Advantest Corporation | Date: 2016-07-28

Provided is an exposure apparatus that exposes a pattern on a sample, the exposure apparatus including a plurality of blanking electrodes that are provided corresponding to a plurality of charged particle beams and each switch whether the corresponding particle beam irradiates the sample according to an input voltage; an irradiation control section that outputs switching signals for switching blanking voltages supplied respectively to the blanking electrodes; and a measuring section that, for each blanking electrode, measures a delay amount that is from when the switching signal changes to when the blanking voltage changes.


Patent
Advantest Corporation | Date: 2017-08-23

The invention provides an exposure apparatus (100) including a formation module (122) which forms charged particle beams with different irradiation positions on a specimen. The formation module (122) includes: a particle source (20) which emits the charged particle beams from an emission region (21) in which a width in a longitudinal direction is different from and a width in a lateral direction orthogonal to the longitudinal direction; an aperture array device (60) provided with openings (62) arranged in an illuminated region (61) in which a width in a longitudinal direction is different from a width in a lateral direction orthogonal to the longitudinal direction; illumination lenses (30, 50) provided between the particle source (20) and the aperture array device (60); and a beam cross-section deformation device (40) which is provided between the particle source (20) and the aperture array device (60), and deforms a cross-sectional shape of the charged particle beams into an anisotropic shape by an action of a magnetic field or an electric field.


To reduce test costs by reducing the number of pattern generators provided to a test apparatus. A test apparatus that tests a device under test and a test method are provided, the test apparatus comprising: a packet transmitting unit that packetizes and transmits, during a test of the device under test, a test pattern to be supplied to the device under test; a packet transferring unit that transfers a packet transmitted by the packet transmitting unit; a packet receiving unit that receives the test pattern transferred via the packet transferring unit; a buffering unit that buffers the test pattern received by the packet receiving unit; and a test signal supply unit that supplies the device under test with a test signal according to the test pattern acquired from the buffering unit.

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