Deng G.,National Key Laboratory of Advanced Display Technology |
Deng G.,Hefei University of Technology |
Deng G.,Academy of Photoelectric Technology |
Yang J.,National Key Laboratory of Advanced Display Technology |
And 11 more authors.
Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology | Year: 2012
The transverse magnetic field distribution in the multi-beam periodic permanent magnet (PPM) focusing system was modeled and simulated. The influence of the coupled slot on the transverse magnetic fields in different beam tunnels was analyzed; the impact of saturation of the pole piece on different beam tunnels was evaluated. A novel technique was proposed to reduce the intensity of the transverse magnetic field in the multi-beam PPM focusing system. The simulated results show that a decrease of the separation between the coupled slot and beam tunnel results in an increase of the transverse magnetic field intensity, and the impact of the saturation of the pole piece on the beam tunnel linearly depends on the separation. When it comes to the intensity reduction of the transverse magnetic field, the multi-beam PPM focusing system with an increased radius of the ferrules outperforms the conventional one beam PPM focusing system.