11 116 Research Dr

Saskatoon, Canada

11 116 Research Dr

Saskatoon, Canada
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Subramanian V.R.,Canadian Light Source Inc. | Achenbach S.,University of Saskatchewan | Achenbach S.,11 116 Research Dr | Achenbach S.,Karlsruhe Institute of Technology | And 6 more authors.
AIP Conference Proceedings | Year: 2010

SyLMAND, the Synchrotron Laboratory for Micro and Nano Devices at the Canadian Light Source, consists of a dedicated X-ray lithography beamline on a bend magnet port, and process support laboratories in a clean room environment. The beamline includes a double mirror system with flat, chromium-coated silicon mirrors operated at varying grazing angles of incidence (4 mrad to 45 mrad) for spectral adjustment by high energy cut-off. Each mirror can be independently moved by two stepper motors to precisely control the pitch and vertical position. We present in this paper the machine protection system implemented in the double mirror system to allow for safe operation of the two mirrors and to avoid consequences of potential stepper motor malfunction. © 2010 American Institute of Physics.


Achenbach S.,University of Saskatchewan | Achenbach S.,11 116 Research Dr | Achenbach S.,Karlsruhe Institute of Technology | Subramanian V.,Canadian Light Source Inc. | And 3 more authors.
Microsystem Technologies | Year: 2010

SyLMAND, the Synchrotron Laboratory for Micro and Nano Devices at the Canadian Light Source, is a new deep X-ray lithography facility focusing on spectral and beam power adjustability and large exposable area formats. We present the concept of the bend magnet beamline and its main components. A double disk intensity chopper offers the unique capability of continuous average beam power reduction to a range between 261 W and approximately 0.1 W without affecting the spectrum. Continuous spectral tuning between 1-2 keV and >15 keV photon energy is achieved using a double mirror system and low atomic number pre-filters. The radiation fan is more than 150 mm wide, allowing for full 6" wafer exposure under vacuum conditions. We furthermore describe the vacuum window concept that was required as a result of the large exposure area and broad spectral tunability. © 2010 Springer-Verlag.


Subramanian V.,Canadian Light Source Inc. | Achenbach S.,University of Saskatchewan | Achenbach S.,11 116 Research Dr | Achenbach S.,Karlsruhe Institute of Technology | And 9 more authors.
Microsystem Technologies | Year: 2010

SyLMAND, the Synchrotron Laboratory for Micro and Nano Devices at the Canadian Light Source, consists of a dedicated X-ray lithography beamline on a bend magnet port, and process support laboratories in a cleanroom environment. The beamline comprises a double mirror system with flat, chromium-coated silicon mirrors operated at varying grazing angles of incidence for spectral adjustment by high energy cut-off. We present in this paper, the in situ diagnostic components inside the vacuum vessel upstream and downstream of the mirrors that allow for monitoring the incident beam and the reflected beam after first, second, and both mirrors. Four fly wire systems are used for beam position monitoring and intensity measurements. Additionally, four detector plates mounted on and moving with the mirror bodies are used to determine the position of the mirror surfaces with respect to the beam. First experimental results verify the capabilities of the system by showing good agreement between measured and calculated data. © 2010 Springer-Verlag.


Hashemi M.,University of Saskatchewan | Hashemi M.,11 116 Research Dr | Achenbach S.,University of Saskatchewan | Achenbach S.,11 116 Research Dr | And 4 more authors.
Microsystem Technologies | Year: 2010

This study demonstrates the design and microfabrication of single cylindrical submicron-sized pores in 1 (im-thick PMMA membranes, and their integration and assembly into all-polymeric electrophoretic detectors. Pore sizes vary from 200 to 600 nm. Fabrication includes electron beam lithography of the pore and mechanical microfabrication and assembly of the remaining detector system, using UV-curing glues and a silicon sacrificial substrate wafer. Initial electrophoretic translocation experiments have been performed for various potassium chloride (KCl) electrolyte concentrations between 0.1 and 1 M. Experiments prove that the detector system is hermetically sealed, that the pores are capable of sustaining an open pore current, and that they respond with a steady and low-noise signal. The same experiments have also been applied to analyze the pore metrology, and revealed that submicron pore sizes have been underestimated by roughly 150 nm. © 2009 Springer-Verlag.


Hashemi M.,University of Saskatchewan | Hashemi M.,11 116 Research Dr | Moazed B.,University of Saskatchewan | Achenbach S.,University of Saskatchewan | And 3 more authors.
IET Nanobiotechnology | Year: 2012

Detection and discrimination of nanoparticles is a vital step in several analytical and diagnostic procedures. Towards this, the authors present in the current study, for the first time, an all poly(methyl-methacrylate) (PMMA) polymer membrane-based solid-state sensor capable of detecting single silica nanoparticles. The sensor is based on a single cylindrical submicron pore of 450 nm in diameter and 1 μm in length, patterned by electron beam lithography in a PMMA membrane. It was subsequently integrated into a PMMA-based electrophoretic flow detector system containing two electrolyte reservoirs. Silica nanoparticles of 100 nm in diameter were dispersed in an electrolyte and detected as they temporarily block the current flow during translocation through the submicron pore, driven by an electric field. The submicron pore was highly stable, and able to not only detect but also discriminate between silica nanoparticles of different dimensions recognised by different amounts of current blockade produced as they translocated through the pore. The translocations of individual 100 and 150 nm diameter silica nanoparticles through the single submicron pore, and thus the amounts of current blockade they produce, were shown in very close agreement with the results evaluated mathematically using the model presented in this study. © 2012 The Institution of Engineering and Technology.

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